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We summarized the current advancement position with the large-power DUV laser both equally on the wavelength of FHG of your 1-μm laser and at 193 nm. The recent progress in the stable-condition/fiber laser, in addition to the nonlinear optical crystals, prompts not only the normal electrical power but also the beam high quality (coherence) with the DUV lasers to an unparalleled amount.
The normal ability of your NIR laser continue to has the potential to get improved to tens of watts which include 70 W [26] If your double-pass configuration may be utilized for the Yb:YAG SCF amplifier phase. Therefore, Should the conversion efficiency of 31% from NIR to DUV may very well be nevertheless preserved at this higher electric power affliction, the standard output electric power of your DUV laser at 258 nm could possibly be more than 20 W, which might certainly be a amazing ability level for the DUV laser and produce the unanticipated DUV laser machining outcomes. In addition, for high-electrical power DUV laser, the UV injury in the nonlinear crystal, including the windows for CLBO crystal and the mirrors, is another critical parameter for lasting and steady operation.
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On the opposite side, the facility scaling on the NIR laser is another component to improve the typical ability on the 193-nm DUV laser. Because of the not enough the substantial-ability amplification Remedy with the NIR laser (for example at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) can be placed on build a wavelength converter by shifting the wavelength from 1 μm to read more the desired wavelength along with obtaining relative larger electricity [21]. A short while ago, a diamond Raman laser showed its potential in reaching a higher electricity and a high conversion performance within the 1st Stokes from the one-μm laser [22,23], which suggests the possibility to be applied in the 193-nm DUV laser generation thanks to its significant Raman obtain and enormous frequency change.
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Moreover, combining the good-condition laser with other nonlinear system including stimulated Raman scattering, NIR lasers could be attained at new wavelengths with superior ability and significant beam high-quality, which was examined via the proof-of-principle experiment. This Raman laser scheme gives a different path to the high-energy DUV laser, Specifically at the wavelength of 193 nm.
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